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Kaishan Group | Kaishan’s first domestic centrifugal dual-medium gas combination machine

Kaishan Group | Kaishan’s first domestic centrifugal dual-medium gas combination machine

The centrifugal dual-medium gas combination air compressor independently developed by Kaishan Shanghai General Machinery Research Institute has been successfully debugged and put into use at a world-leading integrated circuit manufacturing company in Jiangsu. All parameters have met the design requirements and won praise from users.

The centrifugal dual-medium gas combination air compressor

As we all know, among the eight core materials in the semiconductor industry, electron gas is the main raw material after silicon, accounting for 13.5% of the value of semiconductor wafer manufacturing materials. Electronic gases are widely used in ion implantation, etching, vapor phase, deposition, doping and other processes in electronic product manufacturing processes. They are called the "food" and "source" of integrated circuits, LCD panels, LEDs, photovoltaics and other materials. The performance of electronic semiconductor devices is closely related to the quality of electronic gases, and high-purity/ultra-high-purity nitrogen is one of the most important members of electronic gases. It is used in inert protection, carrier gas, special gases, pipeline purge exhaust, Raw material gas and process gas are indispensable in semiconductor production processes such as dilution and plasma implantation. The centrifugal dual-medium gas combined compressor unit is the core equipment in the high-purity nitrogen production process. This type of compressor market has long been monopolized by American companies.

The unit successfully put into operation this time is the first domestic compressor of this type manufactured by Kaishan and with completely independent intellectual property rights. It is used in the nitrogen production system of a Fortune 500 internationally renowned gas company. This is also the first time this company has cooperated with Chinese compressor manufacturers cooperate. The successful operation has greatly enhanced the market competitiveness of the company's high-purity nitrogen preparation system. This is the result of four years of joint efforts by both parties.

At the same time, the debugging work of two sets of this type of air compressor used in domestic high-purity nitrogen preparation systems has also been completed. All parameters have met the design requirements, and some parameters have even exceeded the design requirements.

Over the past two decades, Kaishan has continued to invest heavily in core technologies and gradually built certain technological advantages in various fields such as screws, turbines, reciprocating compressors, expanders, and vacuum pumps. In the context of the current increasing demand for "localization", this technological advantage allows our Chinese users not only to not sacrifice the quality of the equipment they need due to "localization", but also to obtain more reliable equipment after "localization". Product quality and lower energy consumption. For our international users, they find that Chinese equipment represented by Kaishan has brought them greater benefits. The successful operation of this centrifugal dual-medium gas combination air compressor is just a small example of the above words.


Post time: Oct-25-2023

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